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Lithography Optics

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SERVTECH provides high quality secondary source parts and optical components to Canon lithography users at significant savings over the OEM originals. Our optics provider controls each step in the manufacturing process, from design specification through final testing of the coating surface.


Only the highest quality optical glasses and materials are used in the manufacturing of these products. The process utilizes the finest equipment for the most precise manufacturing possible. Both ultra-sonic and plasma cleaning are used for surface activation and to enhance coating adhesion. Optics are coated with dielectric coatings, using state of the art technology resulting in coatings with:

  • High Density
  • High Environmental and Thermal Stability
  • High Mechanical Hardness /Abrasion Resistant
  • Low Absorption and High Laser Damage Threshold

Assembly and testing takes place in a clean room environment using spectrophotometers, interferometers and microscopes for surface inspection.

Refurbishment of optical components is also available. Our optics provider will disassemble and inspect parts, remove optical coat-ings, re-polish surfaces, test, clean, and coat surfaces, test again and reassemble in a clean room environment.

Reverse and reengineering services are also available.

Inquire today and discover the value in high quality second source optics for your Canon lithography systems.