| Part # |
Image |
Alternate Part # |
Price |
Description |
| 2nd Zoom - Repair |
|
|
|
Repair of the 2nd Zoom for the Canon FPA-3000 |
| BE4-7795-000 |
|
|
|
Vacuum Pad, Rubber |
| BF6-3046-000 |
|
|
|
Unit Finger 5" - 8" |
| BF6-3046-020 |
|
|
|
Ceramic Feed Hand |
| BF6-3467-000 |
|
|
|
3" - 4" Finger Unit w/ spacer |
| BG3-2223-000 |
|
|
|
6" No. 732-01 Layout the HV Chart |
| BG3-2524-000 |
|
BN9-7939-000 |
|
Image Shifter #1 Minor Wedge Filter
Assembly is BN9-7939-000 |
| BG3-2525-000 |
|
BN9-7942-000 |
|
Image Shifter #2, Minor Wedge Filter
Assembly is BN9-7942-000 |
| BG3-2617-000 |
|
|
|
8" T2 LCR Wafer Chuck |
| BG3-2769-000 |
|
|
|
Image Shifter |
| BG3-2796-000 |
|
|
|
Image Shifter - Refurbishment |
| BG3-3089-000 |
|
|
|
STG CD2 PCB Assembly |
| BG3-3367-001 |
|
|
|
6" No. 310-0 i5 Standard Test Reticle |
| BG3-3368-000 |
|
|
|
6" No. 610-04 i5 Standard Test Reticle |
| BG3-4062-000 |
|
|
|
Laser Head Unit |
| BG4-3329-000 |
|
|
|
Ring Chuck |
| BG4-3984-000 |
|
|
|
6" No. 780-02 High Accuracy Reticle |
| BG4-4329-000 |
|
|
|
6" Reticle Cassette |
| BG4-5372-020 |
|
|
|
Zygo Laser Model 7701 C/E |
| BG4-6465-000 |
|
|
|
Measurement PCB (X) Assy |
| BG4-6631-000 |
|
|
|
CD I/F PCB ASS'Y |
| BG4-6690-000 |
|
|
|
Refurbishment of 1st Condenser Main (Upper) |
| BG4-6699-000 |
|
|
|
Refurbishment of Shutter Unit |
| BG4-6751-000 |
|
|
|
Hand Unit, Reticle Robot |
| BG4-6758-U00 |
|
|
|
4" SEMI Detector Unit (L) |
| BG4-6761-U00 |
|
|
|
8" Notch Detector Unit (L) |
| BG4-6854-000 |
|
|
|
8" Standard Pin Wafer Chuck Notch |
| BG4-7928-000 |
|
|
|
8" Standard Ring Wafer Chuck Notch |
| BG4-7932-000 |
|
|
|
8" Standard Ring Wafer Chuck Flat |
| BG4-7933-000 |
|
|
|
Vacuum Ring Chuck 6" for FPA-3000 |
| BG4-7938-000 |
|
|
|
Assy, PCB, IL Pre-Amp |
| BG4-9175-000 |
|
|
|
MLE IF PCB |
| BG4-9593-000 |
|
|
|
8" Notch T2 LCR Wafer Chuck |
| BG4-9723-000 |
|
|
|
4" Standard Pin Wafer Chuck Flat |
| BG4-9724-000 |
|
|
|
4" TiO2 Ring/Semi & Jeida Wafer Chuck |
| BG4-9725-U00 |
|
|
|
5" Pin Chuck Notch |
| BG9-3501-000-RP2 |
|
|
|
PCB, Assy, IMP-2A |
| BH2-1218-000 |
|
|
|
Valve, Magnetic |
| BH3-3688-000 |
|
|
|
UPS Battery |
| BM4-0043-000 |
|
|
|
I-Line Filter Unit (new type) |
| BN9-2159-000 |
|
|
|
Cold Mirror Cover Glass |
| BN9-2203-000 |
|
|
|
Cold Mirror Cover Glass TTLAF/FRA |
| BN9-2226-000 |
|
|
|
Unit Cable Optical, Glass |
| BN9-2310-000 |
|
|
|
Uniformity Filter 4% |
| BN9-2311-000 |
|
|
|
Uniformity Filter 6% |
| BN9-2457-000 |
|
|
|
Uniformity Filter 10% |
| BN9-2458-000 |
|
|
|
Uniformity Filter 12% |
| BN9-2849-003 |
|
|
|
Uniformity Filter 3% for 248nm |
| BN9-2849-006 |
|
|
|
Uniformity Filter 6% for 248nm |
| BN9-2849-010 |
|
|
|
Uniformity Filter 10% for 248nm |
| BN9-2946-000 |
|
|
|
Glass Plate 1 EX |
| BN9-2948-000 |
|
|
|
Glass Plate 2 EX |
| BN9-5754-000 |
|
|
|
FRA Mirror G-Line for Mark 3/4 |
| BN9-5759-000 |
|
|
|
Arc Monitor Mirror for Mark 3/4 |
| BN9-5927-000 |
|
|
|
G-Line Blue Filter |
| BN9-6177-030 |
|
|
|
Ellipsoidal Mirror |
| BN9-6206-000 |
|
|
|
Cold Mirror TTLAF/FRA |
| BN9-6210-xxx |
|
|
|
Main I-Line Filter TTLAF/FRA 2000 |
| BN9-6211-xxx |
|
|
|
Sub I-Line Filter TTLAF/FRA FPA 2000 |
| BN9-6634-000 |
|
|
|
Sub I-Line Filter FRA FPA 3000 |
| BN9-6635-000 |
|
|
|
Main I-Line Filter FRA FPA3000 |
| BN9-7005-000-011 |
|
|
|
Filter, optical ND (T= 11%) |
| BN9-7005-000-025 |
|
|
|
Filter, Optical, ND (T= 25) |
| BN9-7005-000-035 |
|
|
|
Filter, Optical, ND (T= 35) |
| BN9-7005-000-042 |
|
|
|
Filter, Optical, ND (T=42) |
| BN9-7005-000-050 |
|
|
|
Filter, Optical, ND (T=50) |
| BN9-7005-080 |
|
|
|
ND Filter for Uniformity Improvement |
| BN9-7269-000 |
|
|
|
Main Exp I-Line Filter FPA2000/2500 |
| BN9-7422-000 |
|
|
|
Cold Mirror for ALFC/FRA |
| BN9-7478-000 |
|
|
|
I Line Filter ALFC |
| BN9-7513-000 |
|
BN3-1845-000 |
|
Main Exposure I-Line Filter |
| BN9-7772-000 |
|
|
|
Uniformity Filter 4% for FPA 2000/2500 |
| BN9-7773-000 |
|
|
|
Uniformity Filter 6% for FPA 2000/2500 |
| BN9-7774-000 |
|
|
|
Cover Glass Lower FPA3000 |
| BN9-7775-000 |
|
|
|
Upper Cover Glass |
| BN9-7938-000 |
|
|
|
Image Shifter #2, Entrance Glass #4 |
| BN9-7940-000 |
|
|
|
Image Shifter #1, Entrance Glass #1 |
| BN9-7941-000 |
|
|
|
Image Shifter #2, Exit Glass #6 |
| BN9-7943-000 |
|
|
|
Image Shifter #1, Exit Glass #3 |
| BN9-8343-000 |
|
|
|
Image Fiber Unit |
| BY9-8540-000 |
|
|
|
UPP-880 Video Printer Sony |
| BY9-8545-000 |
|
|
|
UPP-110HD Sony (High Density) |
| BY9-9199-000 |
|
|
|
Retainer Shift Correction Tool |
| BY9-9200-16.7 |
|
|
|
Block Gauge |
| BY9-9200-17.3 |
|
|
|
Block Gauge |
| BY9-9451-000 |
|
|
|
Retainer Shift Correction |
| Compact Flash (CF) D |
|
|
|
Compact Flash (CF) for the Canon FPA-3000 Series Stepper |
| Sales |
|
|
|
Workstation 712/100 with iW HDD |
| Sales |
|
|
|
Wafer Chuck, Ring Type, 6" |
| Sales |
|
|
|
Wafer Chuck, Ring Type, 8" |
| Sales |
|
|
|
Rectangular Fly's eye |
| Sales |
|
|
|
Test Reticles 610 and 725 |
| Sales |
|
|
|
Reticle 780 for uneven focus check iW |
| Sales |
|
|
|
Oscillscope: Test Tool |
| Sales |
|
|
|
OAI Meter: Test Tool |
| Sales |
|
|
|
6" Standard Pin Chuck for FPA-3000 |
| Sales |
|
|
|
8" Low contact Pin Chuck for FPA-3000 |
| Sales |
|
|
|
Main Exposure I-Line Filter 10nm |
| Sales |
|
|
|
Ellipsoidal Mirror |
| Sales |
|
|
|
3" Standard Pin Wafer Chuck Notch |
| Sales |
|
|
|
8" Standard Pin Chuck |
| Sales |
|
|
|
4" Semi Flat PA Unit Conversion |
| Sales |
|
|
|
6" Notch PA Unit Conversion |
| Sales |
|
|
|
6" Semi Flat PA Unit Conversion |
| Sales |
|
|
|
8" Notch PA Unit Conversion |
| Sales |
|
|
|
Test Reticle 735 |
| Sales |
|
|
|
Test Reticle 780-01 |
| Y60-0603-020 |
|
605-020 |
|
Main Exposure G-Line Filter for Mark3/4 |
| Y60-0603-020 |
|
Y60-0605-020 |
|
Main Exposure G-Line Filter |
| Y60-0605-020 |
|
|
|
Main Exposure G-Line Filter |
| Y60-0606-020 |
|
|
|
Main Exposure G-Line Filter |
| Y60-0671-000 |
|
Y60-0672-000 |
|
Main Exposure I-Line Filter for FPA-2500 / 3000 |
| Y60-0812-000 |
|
|
|
Feeding Screw Z |
| Y60-0862-000 |
|
|
|
1st Condenser Main Upper |
| Y60-0862-00R |
|
|
|
Refurbishment of 1st Condenser Main Upper |
| Y60-0863-000 |
|
|
|
1st Condenser Lens |
| Y60-0866-U00 |
|
|
|
Fly's Eye Lens Unit |
| Y60-0941-000 |
|
|
|
Auto Feeder Send Hand Unit "L" |
| Y60-1010-000 |
|
|
|
Plane Parallel Unit |
| Y60-1071-000 |
|
|
|
Glass Unit Top |
| Y60-1156-000 |
|
|
|
Wedge Unit, 2 Pieces (each mounted in separate disc) |
| Y60-1160-000 |
|
|
|
Main Seal Glass |
| Y60-1227-000 |
|
|
|
Lens Unit, 2nd Condenser, Type-A, I4 |
| Y60-1229-000 |
|
BG4-6695-000 |
|
Stepper 3rd Condenser Lens |
| Y60-1229-R00 |
|
|
|
3rd Condenser Lens |
| Y60-1275-000 |
|
|
|
Seal Glass Unit with Frame |
| Y60-1276-000 |
|
|
|
Lambda / 4 Plate Unit |
| Y60-1301-000 |
|
|
|
3rd Condenser Lens Assembly |
| Y60-1301-00R |
|
|
|
3rd Condenser Lens Unit with Lens Cap - Refurbished |
| Y60-2160-000 |
|
|
|
Piezo Unit, Z Tilt |
| Y60-2272-000 |
|
|
|
Fine Theta Extension Cable |
| Y75-1056-000 |
|
|
|
X-Terminal |
| Y75-4922-000 |
|
|
|
Temperature Controller |
| Y75-6039-000 |
|
|
|
Cold Mirror - Edge Bead Removal |
| Y75-6319-000 |
|
|
|
712/100 Workstation Computer |
