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PARTS > Canon MPA Parts


Part # or Name:

Part # Alternate Part # Description
(Round) MPA 600/500
(Square) MPA 600/500 (modified square)
10-00789-10 Cooling Coil
24-0036-000
28-5107-030
2HZ0346-000
63-6131-000
63-6349-000
63-6354-000 Washer
63-6354-020 Rubber shim
63-6355-000
63-6356-000
63-6407-000 Spacer
63-6976-000
BA0-1191-000 Turntable Chuck up/Down Cylinder
BA0-1744-000 Coiled Spring
BD0-0485-000
BD0-0642-000
BD0-0753-000 Gear
BD0-0807-000
BD0-0830-000 Spring
BD0-0875-000
BD0-1033-020 Ball bearing
BD0-1037-000 Rubber sheet
BD0-1038-000 Washer
BD0-1039-000
BD0-1040-000 Ring screw
BD0-11090-000 Shaft
BD0-1140-000 V-ring rubber
BD0-1141-000 V ring rubber
BD0-1560-040 Piping Part
BD0-1567-030 Ring Spring
BD0-1568-050 Lcok Disk
BD0-1583-020 Gear
BD0-1586-020 Coil Spring
BD0-1596-050
BD0-1755-000 Spacer
BD0-1876-030 Stopper Plate
BD0-1884-000
BD0-1909-000 Shaft Push Arm
BD0-1913-000 Plate
BD0-1917-000 Coil spring
BD0-1918-000 Mask Loader Cam
BD0-1919-000 Guide screw
BD0-1939-000 Roller
BD0-1986-000
BD0-1989-020 Suction Rubber Unit 3 1/2" - 4"
BD0-1993-000 Bushing
BD0-2152-000
BD0-2153 000 Torsion spring
BD0-2156-040 Rod
BD0-2157-000 Nut
BD0-2158-000 Lever
BD0-2160-000 Arm
BD0-2227-020 Guide Pin, Turntable
BD0-2229-000 Nut
BD0-2347-000 Lamp hold screw
BD0-2812-030
BD0-2813-020 Shaft
BD0-2814-000 Nut
BD0-2889-000 Gear
BD0-2955-000
BD0-3064-000 Pin
BD0-3184-020 Gear
BD0-3195-000 Gear PLA
BD0-3197-030 Bracket PLA
BD0-3200-000 Shaft PLA
BD0-3287-000
BD0-3329-000 Adjusting screw
BD0-3387-040
BD0-3436-000 Plate
BD0-3437-040 Spring Plate
BD0-3438-000 Rubber Shield
BD0-3525-020 Stopper Pin
BD0-3551-000 Shaft for Bearing
BD0-3641-000 Guide
BD0-3850-000
BD0-3882-000 Nipple
BD0-4064-000 Photo Switch
BD0-4099-000 Shaft for bearing
BD0-4191-000
BD0-4210-020 Pin, Chuck MPA-500
BD0-4238-000 TT Up/Down Guide
BD0-4239-000 Block for Chuck
BD0-4410-000
BD0-4446-000 Coiled spring
BD0-4458-000 Guide Bar
BD0-4459-020 Cam
BD0-4460-020 Connecting Plate
BD0-4461-000 Spring Shaft
BD0-4462-000 Coiled Spring
BD0-4463-000 Shaft
BD0-4467-000 Coiled Spring
BD0-4470-000 Roller
BD0-4471-000 Shaft
BD0-4502-000
BD0-4503-000 Piston
BD0-4504-000 Spring
BD0-4506-000
BD0-4509-020 BD0-4509-000 Holder for lamp
BD0-4536-000
BD0-4537-000 Clamp
BD0-5133-000 Block 4"
BD0-5169-000 Guide piece
BD0-5169-040
BD0-5194-000 Worm Gear
BD0-5194-020 Worm gear
BD0-5195-000 Worm wheel
BD0-5198-000 Ball bearing
BD0-5200-020 BD0-5200-000 Pully drive
BD0-5202-000 Ball bearing
BD0-5204-000 Shaft for pully
BD0-5206-000 Pillow Ball
BD0-5214-000 Coiled spring
BD0-5216-000 Gear Box Belt
BD0-5224-000 Ring screw
BD0-5225-000 Ball bearing
BD0-5228-000 Wire SUS Tention
BD0-5233-000 Linear guide
BD0-5250-000 Carriage Lock Cylinder
BD0-5299-000 Setting Roller 5"
BD0-5300-020 Idler Arm 5" L
BD0-5301-000 Idler Arm 5" R
BD0-5303-000 Idler Arm
BD0-5304-000 Spacer
BD0-5305-000 Bearing Shaft 5"
BD0-5435-000 Cam
BD0-5436-000 Plate
BD0-5437-000 Plate
BD0-5450-000 Coiled Spring
BD0-5526-000 Shaft
BD0-5540-000 Spacer
BD0-5543-000 Coiled Spring
BD0-5650-000 Holder Plate
BD0-5695-000 Slot Handle
BD0-5729-030 Nut G1
BD0-5845-000 Pneumatic cushion feet
BD0-5883-000 Plate A
BD0-5884-000 Plate B
BD0-5885-000 Plate C
BD0-5891-000 Y75-9956-000 Regulator
BD0-6089-000 Duct Adaptor
BD0-6250-000 Ditector Holder Plate
BD0-6553-000 Coiled Spring
BD0-6628-000 Holder
BD0-6636-000 Plate
BD0-6641-000 Holder block for spring
BD0-6642-000 Hold plate for socket
BD0-6644-000 Socket, halogen illuminator female
BD0-6647-000 Block
BD0-6649-000 Hold plate for plug
BD0-6651-000 Plug
BD0-6653-000 L-plate
BD0-6654-000 Knob
BD0-6655-000 Guide bar
BD0-6842-000 Name Film
BD0-6844-000 Name Film
BD0-6981-000
BD0-6982-000
BD0-7044-000 L-plate
BD0-7156-000 Gear
BD0-7157-000 Gear
BD0-7158-000 Gear
BD0-7316-000 L-plate
BD0-7556-000
BD0-7745-000 Insulator
BD0-7749-000 BD0-7749-050 Holder Block for Spring
BD0-7769-000 Lever
BD0-7854-000
BD0-8055-000
BD0-8061-000
BD0-8106-000 Spacer Aluminum
BD0-8124-000
BD0-8125-000
BD0-8127-000
BD0-8128-000
BD0-8129-000
BD0-8131-000
BD0-8225-000
BD0-8226-000
BD0-8424-000
BD0-8425-000
BD0-8429-020 Bolt
BD0-8430-040
BD0-8436-000
BD0-8450-020
BD0-8572-000
BD0-8575-000
BD0-8622-000
BD0-8933-000 Shaft for bearing
BD0-8962-000
BD0-8975-020 Tube connector- A
BD0-8976-020 Tube connector- B
BD0-8995-000 Holder
BD0-8996-000 Connecter
BD0-9156-000
BD0-9431-000 Stopper
BD0-9432-000 Stopper piece
BD0-9434-000 Stopper pin for cover
BD0-9708-000
BD0-9833-000
BD0-9954-000
BD0-9955-000
BD0-9956-000
BD1-0532-000
BD1-0533-000
BD1-0534-000
BD1-0571-000
BD1-1217-000
BD1-1396-020
BD1-1422-020
BD1-2057-000
BD1-2349-000
BD1-2351-000 Release chip
BD1-2496-000 Rubber Roller
BD1-2501-000 Shaft
BD1-2502-000
BD1-2503-000 Nut
BD1-2505-000 Gear
BD1-2508-000 Spring holder
BD1-2743-000
BD1-2855-000
BD1-2946-000 Rubber roller
BD1-2946-020
BD1-2947-000
BD1-2949-000 Shaft bearing
BD1-2950-000 Spacer
BD1-2951-000 Shaft idle bearing
BD1-2952-000 Spacer
BD1-2953-000 Arm (Right) Idle Bearing 6"
BD1-2954-000 Arm (left) Idle Bearing 6"
BD1-2955-000
BD1-2956-000 Holder Cylinder/Bolck
BD1-2959-000 Flat FInder Side Roller
BD1-2960-000 Shaft, x axis - Stand Off
BD1-2968-000 Shaft holder
BD1-2969-000 Shaft - Guide Rods
BD1-2974-000
BD1-2978-000 BD8-3266-000
BD1-2979-000 BD8-3267-000
BD1-2982-000 Screw for Cylinder
BD1-3006-000 Bearing, guide pillow auto
BD1-3007-000 Hand rotation, rack gear
BD1-3015-000 Actuator
BD1-3016-000 Stopper
BD1-3017-000 Stopper
BD1-3038-000 Inclinating plate
BD1-3043-000
BD1-3044-000
BD1-3105-000 Cross Roller Guide
BD1-3118-000 Chopper
BD1-3119-000
BD1-3128-000 Closs plate spring
BD1-3135-000
BD1-3146-000
BD1-3162-000 Segment Gear, Theta
BD1-3167-000 Lock, Leaf Spring
BD1-3196-000 Shutter
BD1-3202-000 Shutter
BD1-3207-000 Spring S
BD1-3219-000 Joint pin
BD1-3221-000 Spring plate S
BD1-3237-000 Gear
BD1-3239-000 Guide feed screw
BD1-3240-000
BD1-3241-000
BD1-3244-000 Gear
BD1-3247-000 Elevator Flag
BD1-3256-000
BD1-3257-000 Nylon Gear
BD1-3261-000 6" Belt
BD1-3272-000 O-Ring AF
BD1-3287-000 Belt 5"
BD1-3288-000 Blade (1.6)
BD1-3292-000
BD1-3294 000 Drive shaft
BD1-3344-000
BD1-3345-000 Ball bearing
BD1-3411-000
BD1-3635-000 6" Pipe
BD1-3640-000
BD1-3641-000 Suction rubber(6")
BD1-3642-020 Handle
BD1-3655-000
BD1-3656-020 BD1-3656-000 Suction rubber(4.5")
BD1-3734-000 Auto hinge
BD1-3743-000
BD1-3744-000 Arm (right) Idle Bearing 5"
BD1-3778-000 Coiled spring
BD1-3786-000 Cam
BD1-3787-000 Plate
BD1-3878-000 Coiled spring
BD1-3889-000 Arm shaft
BD1-3896-000
BD1-3897-000 Arm
BD1-3899-000 Set screw
BD1-3912-000 Shild plate for lock
BD1-3913-000
BD1-3914-000 Pin
BD1-3916-000
BD1-3952-000
BD1-4065-000 Holder roller
BD1-4074-000 Spring hinge
BD1-4082-000 Rubber absorber
BD1-4083-000 Rubber absorber
BD1-4092-000 Conveyor Belt 5"
BD1-4093-000 Belt
BD1-4094-000 Plate
BD1-4301-000 X Guide for Cylindrical
BD1-4307-000
BD1-4308-000 Holder for Pin Hole
BD1-4333-000 Stopper Plate
BD1-4345-000 Collar
BD1-4348-000 Holder, MD Flare Stop
BD1-4350-000 Flare Plate
BD1-5024-000
BD1-5025-000
BD1-5026-000 Spacer
BD1-5029-000 Shaft Bearings
BD1-5030-000 Spacer
BD1-5044-000 Belt 4"
BD1-5150-000
BD1-5151-000 Slit Screw
BD1-5157-000 Shaft
BD1-5159-000
BD1-5193-000
BD1-5200-000 Shock Absorber
BD1-5238-000 Shock Absorber
BD1-5465-000 Housing
BD1-5488-000
BD1-5716-000
BD1-5794-000
BD1-5842-000
BD1-7314-000 Stopper
BD1-7315-000 Arm
BD1-7316-000 Screw
BD1-7815-000
BD1-8371-000 Nipple
BD1-9517-000
BD1-9517-010
BD1-9518-000
BD1-9518-020
BD1-9518-020
BD1-9518-030
BD1-9518-040
BD1-9518-050
BD1-9560-000 Spring
BD2-1453-000
BD2-3996-000
BD2-3998-020
BD2-4932-000
BD6-0073-000 Adj. Slit Unit
BD6-0073-0UP BD1-5164-0UP Blade set block (UPPER)
BD6-0073-low BD1-5164-LOW Blade set block (LOWER)
BD6-0074-000
BD6-0074-000 Adjustment Block Slit
BD6-0076-000 BD1-5168 -000 Block, Blade Inside (LOWER)
BD6-0076-000 Block blade inside
BD6-0076-0UP BD1-5168 -000 Block, Blade Inside (UPPER)
BD6-0078-000 BD1-5167-000 Screw for blade (LOWER)
BD6-0078-0UP BD1-5167-000 Screw for blade (UPPER)
BD6-0081-000 BD1-5171-000 Blade, Inside 1.6 mm (LOWER)
BD6-0081-0UP BD1-5171-000 Blade, Inside 1.6 mm (UPPER)
BD6-0658-000
BD6-2055-000 Plate
BD6-2056-000
BD6-2057-000 Plate for Photo
BD6-2058-000 Shielding Plate
BD6-2059-000 Block
BD6-2062-000 Holder for Connec
BD6-2844-000 Bar
BD6-3411-000 Spring Unit
BD6-3775-000 Shield Plate
BD6-4276-000 Shaft
BD6-4744-000 Ring Screw
BD6-4745-000 Ring Screw
BD6-4747-000 Holder Fiber
BD8-3225-000 Nut
BD8-3266-000 Holder
BF6-0009-000 Rotary solenoid unit
BF6-0018-000
BF6-0027-000
BF6-0028-000
BF6-0078-000 Setting motor unit
BF6-0082-040 Feed Screw Unit
BF6-0087-000
BF6-0089-000 Coupling
BF6-0105-000 Flange
BF6-0106-050 Lever, Tilt
BF6-0108-000
BF6-0109-000
BF6-0160-000 Motor unit (MX.MY)
BF6-0167-000
BF6-0168-000
BF6-0169-000
BF6-0170-000 Motor, Pulse Wafer Stage
BF6-0172-000 Motor
BF6-0190-000 Lamp, Pre-align with base
BF6-0211-000 Y60-0236-000 Air cylinder
BF6-0234-000
BF6-0235-000
BF6-0284-000 Fiber Optic
BF6-0284-000
BF6-0292-040
BF6-0293-040
BF6-0312-000 Cylinder
BF6-0316-000 Filter Unit
BF6-0331-000
BF6-0412-000
BF6-0464-020
BF6-0494-000 Feed Screw Unit
BF6-0501-000
BF6-0515-000
BF6-0526-000 Canon
BF6-0527-000 Canon
BF6-0528-000 Pulse Motor
BF6-0529-000 Motor, pulse, mask stage
BF6-0530-000 Motor, pulse, mask stage
BF6-0532-000 Gear
BF6-0533-000 Gear
BF6-0534-000 Gear
BF6-0535-000 Ball bearing guide unit
BF6-0557-000 Feed screw unit
BF6-0567-000 BF6-6079-000 Auto Hand Up/Down Cylinder
BF6-0568-000 BF6-6080-000 Turn Table Up/Down
BF6-0591-000 BF6-0591-050 G2 Mirror
BF6-0640-000
BF6-0674-020 BF6-0674-000
BF6-0674-050 Mirror unit (B) - G3 for MPA600FA
BF6-0694-000 Suction pad left
BF6-0695-000 Suction pad right
BF6-0838-000 Coupling unit
BF6-0846-000
BF6-0847-000
BF6-2698-000 Feed Hand Bar 5"-8"
BF6-2699-000 Feed Hand 5"-8" Finger Unit right
BF6-2700-000 Feed Hand 5" to 8" Finger Unit left
BF6-2711-000 PA Chuck Unit 5"-8" Tic, Pen
BF6-3046-000 Stepper Send Hand
BF6-6079-000 BF6-0567-000 Auto Hand Up/Down
BF6-6080-000 BF6-0568-000 Cylinder unit (MID )
BF6-6204-000 Bending Mirror/Mirror Unit (A)/G2
BG0-4060-000 IUC Meter
BG0-7358-000 Small - No1 fly`s eye lens Unit
BG0-7360-000 lens unit condenser 0.7
BG4-2890-000
BG4-3119-000 Wafer Chuck 5" Tic, Pin Notch
BG4-3120-000 Wafer Chuck 6" Tic, Pin Notch
BG4-3125-000 Wafer Chuck 8" Tic, Pin Notch
BG4-4044-000
BG4-5652-060 PA Detection Unit, 6" Semi (T4R)
BG4-6697-020 750 hr lamp
BG4-6764-000 Send Hand Finger Unit 3".4"
BG4-6765-000 Send Hand Finger Unit 5"-8"
BG4-6818-000 ASSY, PCB, WF CCD DRV
BG4-6826-000 Assy, PCB, WF LED
BG4-7390-000 750 Hour Lamp
BG6-0072-000 Magnetic valve unit
BG6-0101-000
BG6-0105-000 3" Calibrator Plate for PLA-501FA
BG6-0107-000 Sensor, Photo Wafer Elevator
BG6-0110-000
BG6-0154-000
BG6-0156-000
BG6-0289-000 PCB #16
BG6-0295-000 PCB Assembly
BG6-0296-000 auto feeder board
BG6-0330-000 Joystick Assembly Unit
BG6-0331-000 Photosensor PCB
BG6-0391-000 Laser Power Supply
BG6-0412-000 Illuminator PCB
BG6-0460-000 Cable
BG6-0476-000 Scan Drive Interface PCB # 15
BG6-0477-000 Scan PCB
BG6-0483-000 Calibrator 5"
BG6-0497-000
BG6-0502-000
BG6-0505-000
BG6-0572-000
BG6-0578-000 Vacuum Switch
BG6-0586-000 MPU 2 PCB
BG6-0628-000
BG6-0645-000 Cable Assy / Pressure Switch
BG6-2519-000 Magnification motor
BG9-0111-000 Press Switch (4.3kg)
BG9-0112-000 Press switch (2.3Kg)
BG9-0180-000 Servo Valve SV1, SV3
BG9-0232-000 AFIF2
BG9-0234-000 AF2 Distributor PCB
BG9-0306-000 5" Wafer Disk for MPA-500
BG9-0343-000
BG9-0395-000 PFD PCB
BG9-0404-000
BG9-0406-000
BG9-0410-000 PCB AUto Feeder IF2 - board 18
BG9-0412-000 AA1 PCB
BG9-0413-000 AA2 PCB
BG9-0414-000 AA3 PCB
BG9-0415-000 AA4 PCB
BG9-0428-000 5" Wafer Chuck (set of 2)
BG9-0434-000 MV/TT/AF IF PCB - board 17
BG9-0435-000 Mask Stage IF PCB
BG9-0436-000 Wafer Stage (2) IF PCB
BG9-0477-000
BG9-0548-000
BG9-0549-000
BG9-0831-000
BG9-0961-000
BG9-0966-000 1CH AA (MD) PCB Assy
BG9-0975-000
BG9-1141-000 6" Wafer Disk
BG9-1168-000 PCB
BG9-1169-000 BG6-0239-000
BG9-1184-000 AF3 Distributor PCB
BG9-1221-000 AS IL ML PCB
BG9-1229-000 2KW Starter Unit
BG9-1419-000 Pre-Amp PCB
BG9-1429-000 Servo Valve SV2, SV4 70L MYF, MYB
BG9-1430-000 TT DIST Turn Table Distributor board
BG9-1552-000 6" Wafer Chuck for PLA
BG9-1746-000 Thumbwheel SW
BG9-1767-000 7" Mask Holder for PLA
BG9-1773-000
BG9-1815-000 6" F Parts for PLA
BG9-2101-000 AF3 distributor PCB
BG9-4153-000
BG9-8331-000
BG9-8803-000 AA3 PCB for MPA-600SUPER
BG9-8829-000 Scan IFQ PCB
BG9-8830-000
BG9-8864-000 PCB
BG9-8872-000
BG9-8876-000
BG9-8985-000 Thumbwheel Switch & cable unit
BG9-9371-000
BG9-9372-000
BG9-9522-000 TV- Distributor PCB 1
BG9-9523-000 TV - Distributor PCB 2
BG9-9553-000 TV I/o Drive PCB
BG9-9655-000 AF PCB (MPA-600Super)
BH0 4098-000 Photo diode
BH0-0057-000 Transistor
BH0-1069-000 Photo diode
BH0-2106-000 IC
BH0-2107-000 IC
BH0-2108-000 IC
BH0-2109-000 IC
BH0-2122-000 Transistor
BH0-4019-000 Transistor
BH0-4023-000
BH0-4029-000 BH0-4372-001 Photo Interruptor
BH0-4056-000 LED (Green) DB-9GRN
BH0-4058-000 LED (red) DB- 9 RED
BH0-4064-000 IC
BH0-4115-000
BH0-4120-000 Photo diode
BH0-4155-000 Photo diode
BH0-4172-000 IC
BH0-4178-000
BH0-4372-000 BH0-4029-000 IC
BH0-8004-000 Capactive Switch
BH1-2012-000 Variable resistor
BH1-2028-000 Variable resistor
BH1-2042-000 Variable Resistor
BH2-0061-000 Motor
BH2-0062-000
BH2-0068-020 BH2-0068-000 Synchronous motor
BH2-0087-000 Motor
BH2-0088-000 Motor
BH2-0090-000 DC Motor
BH2-0092-000 Motor
BH2-0101-000 Fan
BH2-0133-000 Motor, Scan Drive
BH2-0144-000 Motor
BH2-0199-000 BH2-0199-030 Pulse motor
BH2-0202-000 DC motor
BH2-0207-000
BH2-0240-000 Switch
BH2-0256-000 Y60-4072-000 Motor Elevator
BH2-0288-000
BH2-0383-000 Y60-0658-000 Motor
BH2-0388-000 DC Servo Motor
BH2-0514-000
BH2-0574-000
BH2-9019-000 Gearbox
BH2-9095-000 DC Motor Drive PCB
BH3-0081-000
BH3-0211-000 Push button switch
BH3-0212-000 Push button switch
BH3-0221-000
BH3-0229-000 Push button switch
BH3-0230-000 Switch
BH3-0231-000 Switch
BH3-0232-000 Switch
BH3-0233-000 Counter switch
BH3-0234-000 Switch
BH3-0235-000 Counter switch
BH3-0237-000 Rotary switch
BH3-0239-000 Push switch
BH3-0240-000 Push switch
BH3-0243-000 Push switch
BH3-0244-000 Push switch
BH3-0245-000
BH3-0253-000
BH3-0254-000
BH3-0255-000
BH3-0256-000
BH3-0267-000
BH3-0304-000 Switch see-saw
BH3-0353-000
BH3-0365-000
BH3-0370-000
BH3-0422-000 Thumb Wheel Switch
BH3-0475-000
BH3-0476-000
BH3-0477-000
BH3-2101-000
BH3-2193-000 Switch, Panel
BH3-3021-000 BH3-3181-000 Tungsten Filament Lamp/ Bulbs Pre-Align 6.0V-Wheat
BH3-3035-000 Indicator
BH3-3036-000 Tungsten Filament Lamp
BH3-3079-000 Tungsten filament lamp
BH3-3098-000 Laser Head
BH3-3106-030 Mercury Lamp, 2KW
BH3-3181-000 BH3-3021-000 Tungsten Filament Lamp/ Bulbs Pre-Align 6.0V-Wheat
BH3-3182-000 Peanut Bulb for Prealigner
BH3-3200-000
BH3-3207-000 24 V Power Supply
BH3-4064-000
BH3-4209-000 Angle pin header
BH3-4235-000
BH3-4318-000
BH3-4617-000 Connectorum
BH3-4834-000 Plug
BH3-4867-000 Receptacle
BH3-4953-000 Data Cable
BH3-5076-000 Socket
BH3-5359-000
BH3-8028-000 Temperature switch
BH3-9349-000 Bezel
BH3-9349-000
BH3-9377-000 Switch
BH3-9382-000 Lever
BH3-9382-000
BH5-3038-000 SR1 12 Volt 4.5 AMP Power Supply
BH5-3039-000 SR2 5 Volt 20 AMP Power Supply
BH5-3040-000 SR3 12 Volt 8 AMP Power Supply
BH5-3041-000 SR4 24 Volt 6 AMP Power Supply
BH5-3132-000 BH5-3085-000 Stepping Motor Unit
BH5-4085-000
BH5-6011-030 Thermostat
BH5-6016-000 Thermal Coupler
BH5-6108-000 Optical Scale for MPA-600Super
BH5-6109-000 Wave Shape Unit
BH5-7408-000
BH5-7510-000 BH5-7104-000 Magne Scale for MPA-600
BH6-4163-000 BH2-0292-000
BH8-0067-000 AF/IF-3 (FOR MPA600-FA) Board
BN9-2803-000 Laser Seal Glass
BN9-4250-000 Mirror polygonal
BN9-4439-00R G5 Parabolic Mirror - Refurbished
BN9-4440-000 G8 Mirror
BN9-4442-000 G3 Mirror for MPA-500
BN9-4442-00R G3 Mirror Refurbished
BN9-4443-030 G4 Mirror for MPA-500
BN9-4443-03R G4 Mirror Refurbished
BN9-4444-000
BN9-4444-030 Mirror
BN9-4444-03R Mirror - Refurbished
BN9-4445-020 Mirror
BN9-4446-000 Filter
BN9-4447-000 Filter
BN9-4466-000 Filter
BN9-4612-030 Glass Plate
BN9-4612-03R Glass Plate - Refurbished
BN9-4643-000 Filter
BN9-4644-000 G1 mirror - refurbished - MPA-500
BN9-4644-020 G1 Mirror for MPA-500
BN9-4679-000 Lens (D=13.4)
BN9-4680-000 Lens
BN9-4709-030 Mirror for PLA
BN9-4731-000
BN9-4901-000
BN9-4965-000
BN9-5015-000 G1 Mirror for MPA-600
BN9-5015-00R G1 Mirror - Refurbished
BN9-5017-000 Lens flys eye, cylindrical (standard)
BN9-5022-000 Mirror
BN9-5022-000 Mirror
BN9-5024-000 Half mirror
BN9-5025-000 G8 mirror
BN9-5025-00R G8 Mirror refurbished
BN9-5026-000 G4 Mirror
BN9-5032 -000 Lens el;ement(0.7) - New
BN9-5032-00R Condensor Lens - Refurbished
BN9-5033 -000 Lense element (0.7)
BN9-5033-00R Condensor Lens - Refubished
BN9-5202-00R Condenser Lens - Refurbished
BN9-5203-000 Condenser Lens - New
BN9-5203-00R Condensor Lense - Refubished
BN9-5204-000 Condenser Lens - New
BN9-5204-00R Condensor Lens - Refurbished L8
BN9-5205-000 Condensor Lens - New
BN9-5206-000 G4 Mirror
BN9-5206-00R G4 recoating
BN9-5207-000 G5 Mirror
BN9-5207-00R G5 Mirror - refurbished
BN9-5407-000 Mirror - New
BN9-5407-00R Plate Glass - Refurbished
BN9-8079-000 Half Mirror
BN9-8083-000
BN9-8157-000 Condenser Lens
BN9-8157-00R Condener Lens - Refurb
BN9-8158-000
BN9-8164-000
BS0-1042-000 Screw
BS1-1523-000 Coil spring
BS1-2022-030 Ring rubber
BS1-2026 -000 Ring rubber
BS1-2044-000 Ring rubber
BS2-0007-000 Bush
BS2-0060-000 Ball bearing
BS2-0061-000 Ball bearing
BS2-0062-000 Ball bearing
BS2-0076-000
BS2-0077-000 Slide bushing
BS2-0093-000 Ball bearing
BS2-0097-000
BS2-0099-000 Ball bearing
BS2-0120-000
BS2-0121-000 Ball bearing
BS2-0129-000 Ball bearing
BS2-0130-000
BS2-0131-000 Ball bearing
BS2-0133-000 Flat Finder Side Roller
BS2-0136-000
BS2-0139-000
BS2-0140-000
BS2-0142-000 Ball bearing
BS2-0144-000
BS2-0152-000 Ball bearing
BS2-0163-000
BS2-0171-000
BS2-0204-000 Ball bearing
BS2-0224-000 Ball slider
BS2-0272-000 Ball bearing
BS2-0299-000 Ball bearing
BS2-0300-000 Ball bearing
BS2-0301-020 BS2-0301-000
BS2-1020-000
BS2-1033-000
BS2-7099-000
BS6-0101-000 Bellows for PLA
BS6-0156-000 Vacuum Gauge
BS6-0160-000
BS6-0164-000
BS6-0174-000
BS6-0179-000 Elbow
BS6-0184-000 Cylinder
BS6-0184-000
BS6-0191-000 Tubing
BS6-0207-000 Main Air Filter
BS6-0252-000
BS6-0290-000
BS6-0309-000
BS6-0312-000 Cylinder
BS6-0337-000 BS7-4124-000
BS6-0358-000 BS7-4145-000 Feeding Unit Cylinder for PLA500/600
BS6-0363-000 A-Scope Cylinder
BS6-0363-DIA DIaphragm for Air Cylinder
BS6-0399-000
BS6-0471-000
BS6-0511-000
BS6-0593-000
BS6-0658-000 Switch Cover
BS6-0661-000 BS7-4012-000
BS6-0662-000 Manual Valve
BS6-0663-000 BS7-4153-000 Cylinder
BS6-0664-000
BS6-0665 -000 Cylinder
BS6-0667-000 Turntable, Shock Absorber
BS6-0926-000
BS6-0931-000
BS6-0955-000 BS6-0637-000 Controller, Double Speed
BS6-0995-000
BS6-5115-000 Nipple
BS6-5115-000
BS7-1060-000 Filter air
BS7-4003-000 Cylinder
BS7-4004-000 Cylinder
BS7-4005-000 Cylinder
BS7-4007-000 Cylinder
BS7-4009-000 BS6-0663-000 Cylinder
BS7-4122-000 BS6-0312-000 Cylinder
BS7-4153-000 BS7-4009-000 Cylinder
BY9-0018-000 Short bit
BY9-0019-000 Long bit
BY9-0502-000 Arkansas Stone
BY9-8004-000 Extender PCB
BY9-8022-000
BY9-8089-000
BY9-8183-000 Halogen Lamp
BY9-8189-000
BY9-8196-000
BY9-8197-000
BY9-8198-000
BY9-8461-000 Gauge for optical scale
BY9-8467-000 Optical Sesor Cable
BY9-8468-000 PCB Tool
BY9-8469-000 linear Motor Position Toool
BY9-8470-000 Linear Motor Gap Tool
BY9-8566-000 Oscilligraph
BY9-9251-000 Stepper Tool
BY9-9451-000 Stepper Tool
CY9-7015-000 Screwdriver
CY9-8012-000 Adhsive - Green Glue
ND0-1860-000
SD-3042-630 Bolt, Shoulder
SD-4323-320
SVT-0003-0AH Auto Hand Base Plate
SVT-0037-00x Mask Holder Plate 5" ,6", 7"
SVT-0037-0Sx Mask Holder Plate 5", 6", 7"
SVT-0045-00x Wafer Disc: 3", 4" or 5" MPA 500
SVT-0046-00x Y60-4330-R00-066 Wafer Disc 4", 5" or 6" MPA 600
SVT-0047-00x 4", 5" or 6" Quartz Wafer Chuck
SVT-0138-6mm 1.6mm Slit Blade (upper)
SVT-0139-6mm Slit Blade (lower)
SVT-0140-000 3.0 mm Slit Blade (upper)
SVT-0141-000 3.0 mm Slit Blade (lower)
SVT-0142-000
SVT-0143-000
SVT-0144-000
SVT-0201-000 Condenser Lens Bracket Type 2 ill.
SVT-0250-RET 250 Reticle
SVT-0265-000 Y60-4026-000 Arcuate Slit Blade Assembly
SVT-0365-RET 365 Reticle
SVT-0500-00x Wafer Chuck: 4", 5", or 6" MPA 500
SVT-0501-00x 3", 4", 5" Pre-Alignment Unit MPA 500
SVT-0600-00x BG9-1146-000 Wafer Chuck: 4", 5", or 6" MPA 600
SVT-0601-00x 4", 5", 6" Pre-Alignment Unit MPA 600
SVT-1000-000 Mask and Wafer Set
SVT-1050-000 Focus Mask/Tilt Mask 7"
SVT-3100-000 A-Scope Cable Upgrade Kit
SVT-5150-000 Y60-4553-000 MPA 500 Secondary Mirror Refurb
SVT-5160-000 Y60-4554-000 MPA 600 Secondary Mirror Refurb - convex
SVT-5W-DR-003 5" Quartz Wafer
SVT-6150-000 MPA 500 Trapezoidal Mirror Refurb
SVT-6160-000 Y60-4560-00R MPA 600 Trapezoidal Mirror Refurb
SVT-6M-DR-0003 6" Test Mask
SVT-6W-DR-003 6" Quartz Wafer w/ standard flat
SVT-7000-000 6" Vacuum Pin Chuck - set for MPA-600
SVT-7M-DR-003 7" Test Mask
SVT-8001-000 Ultrasonic Solution
SVT-9001-000 FIber Optic Cables
SVT-9002-000 Yellow Filter
SVT-9050-000 Light Vision Unit - LED type
VS1-0904-005
VS1-0904-007 Recepticle
VS1-0905-005
VS1-0905-007
WC1-0025 -000 Paddle switch
WC2-5007-000
WC4-0212-000
WC9 -5008 -000 Bezel
WC9-5004-000
WC9-5005-000
WG1 -9001 -000 Halogen lamp
WG8-0041-000
WG8-0111-000
WS4-0235-000 Contact, Socket
WS4-0236-000 Terminal
WT2-0072-000
X62 -7440 -000 Thermistor
X62-0879-000
X62-6613-000
X62-6856-000
X62-7620-000 Tungsten Filament Lamp
X65 -6205 -000 Transistor
X71-0257-000 Bearings
X71-9484-000
X71-9487-000
XA1-1200-259
XA1-1200-309
XA1-1200-409 Screws
XA1-1200-609 Screw
XA1-1260-409
XA1-1260-409 Screw
XA1-1260-600
XA1-1260-609 Screw
XA1-1261-209
XA1-1261-609V Screw -2.5mmx16mm Phillips Pan head, zinc
XA6-1200-209
XA6-1200-309 Set Screw, Slotted
XA6-1200-409 Screw
XA6-1200-509
XB1-1300-609
XB1-1300-809 Screw, Machine M3X8
XB6-1500-608
XB6-2300-408 Set Screw
XB6-2300-808
XB6-2400-408
XB6-2400-409 Set Screw for Pully
XB6-2400-508
XB7-1030-049 Screw
XB7-1030-089 Screws for handle
XB7-1030-169 Screw
XB7-1030-259
XB7-2100-409
XB7-2200-209 Nut
XB7-2200-309 Nut
XD1 -1106 -233 Washer,Shim
XD1-1102 -622 Washer,Shim
XD1-1102-121 Washer,Shim
XD1-1102-122 Washer,Shim
XD1-1102-124 Washer,Shim
XD1-1102-125 Washer,Shim
XD1-1102-621
XD1-1102-625-
XD1-1103-125 Shim, Circular
XD1-1103-624
XD1-1104 -125 Washer,Shim
XD1-1104-112 Washer,Shim
XD1-1104-122 Washer/Shim
XD1-1105-225
XD1-1106 -231 Washer,Shim
XD1-1106-232 Washer,Shim
XD1-1106-234
XD1-1106-235
XD1-1106-239 Washer,Shim
XD1-1108-221
XD1-1108-222
XD1-1108-225
XD1-1108-229
XD2-1100-172
XD2-1100-321
XD2-1100-322 Retaining ring
XD2-1100-372
XD3-1120-000
XD3-1120-082 Pin PLA
XD3-1120-102 Pin spring
XD3-1140-082
XD3-1140-102 Pin spring tubular
XD3-1140-402 Kick arm cam
XD3-1160-102 Pin spring
XD3-1300-102 Pin spring
XD3-4200-061 Pin
XG2-0876-000
XG2-3008-403 Ball bearing
XG2-3010-401 Bearing
XG3-3008-251 Bearing
XG3-4008-303 SSRF-840ZZ Bearing
XG3-4010 -403 Ball bearing
XG3-4010-000
XG3-6012 -403 Ball bearing
XG3-6019-603 SSRF-1960ZZ Bearing Auto-Feeder Screw Unit
XG8-1100-021 Steel ball
Y60-0151-000
Y60-0198-000
Y60-0274-000
Y60-0281-020 Wafer Stage Locking Plate
Y60-0290-000 Swing mirror unit
Y60-0658-000 BH2-0383-000 Motor
Y60-0812-000
Y60-0859-000 Unit Lens (AF-CCD)
Y60-0860-000 Unit Lens (LED)
Y60-3522-000
Y60-4002-000 6" Arm - Left
Y60-4003-000 6" Arm - right
Y60-4004-000 5" Arm -Right
Y60-4005-000 5" Arm - Left
Y60-4010-000 Base mask chuck
Y60-4011-000 Base mask chuck
Y60-4016-000
Y60-4027-000 Rotary solenoid
Y60-4030-000
Y60-4031-000 XY lock pad unit
Y60-4032-000 Switching regulator
Y60-4037-000 4" Arm - Left
Y60-4038-000 4" Arm - Right
Y60-4040 -000 Concave mirror
Y60-4045-000
Y60-4049 -000 Auto hand relay cable unit
Y60-4072-000 Whole Motor unit
Y60-4076 -000 Shaft unit
Y60-4092-000
Y60-4093-000
Y60-4282-000
Y60-4553-000 Convex Mirror for MPA-500
Y60-4553-00R SVT-5150-000 Convex Mirror for MPA-500
Y60-4554-000 Convex/Secondary Mirror for MPA-600
Y60-4554-00R SVT-5160-000 Convex/Secondary Mirr. Refurb. for MPA-600
Y60-4556-000 Concave Mirror New MPA-500
Y60-4556-00R Concave Mirror Refurb MPA-500
Y60-4557-000 Concave/Primary Mirror New MPA-600
Y60-4557-00R Concave/Primary Mirror Refurb - MPA-600
Y60-4560-00R Trapezoidal Mirror Refurb - MPA600
Y60-9228-000
Y60-9244-000 Digital Panel Meter
Y60-9289-000 Voltmeter
Y60-9290-00 Ammeter
Y60-9294-000 Fan
Y75-1056-000 X-Terminal w/o keyboard, mouse
Y75-5184-000 1500 hr lamp
Y75-9956-000 BD0-5891-000
YBC-4062-000 Curl Code Unit