Auto Feeder: |
Type IV [In-Line Station for Track Interface available] |
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Reticle Size: |
5”, 0.09”t [with Reticle Cassette Bar Code Reader] |
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Current Wafer Size: |
6”(4”, 5” and 8” Sizes Available) |
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Magnification: |
X 1/5 |
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Numerical Aperture: |
0.60 / 0.52 |
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Image Field: |
20 mm [(X)11.14mm x (Y)26mm) |
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Printing Wavelength: |
i-line (365 nm) |
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Resolution: |
0.40μm |
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Illumination Lamp: |
1.5 kW super-high-pressure mercury lamp |
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Illumination Uniformity: |
< ±1.2 % |
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Alignment Modes: |
TTL Off-Axis He-Ne TV TTL Off-Axis Broad Band TV |
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Alignment Light Source: |
He-Ne Laser (633 nm) Broad Band (Halogen lamp) |
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Alignment Accuracy: |
< 0.1μm (mean + 3 sigma) |
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Throughput: |
> 68 wafers / hour (6”, 32 shots) > 44 wafers / hour (8”, 60 shot) |
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Wafer Leveling: |
Die-by-die tilt, Global tilt
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