Canon FPA-3000 i-line and EX Series Steppers
SERVTECH’s training courses are administered utilizing step
lock performance based training. This format is widely accepted in the Semiconductor industry as the most effective
method for training operators, maintenance personnel, and process engineering staff. These courses have been tested at
major semiconductor manufacturers, resulting in complete customer satisfaction. All training will be performed on-site
at your facility.
Click Here to download Training Brochure
Stepper Operation (1 week course):
Course is designed for operators, maintenance personnel, and process engineers.
Students attending this training will perform:
- Safety checks
- Systems status checks
- System startup, shutdown, reset, and subsystem reset
- Console software navigation, job selection, load and configure
- Unit description, sequence of operations and basic fault recognition
- Daily testing (SRC, BLC, IUC, ALFC)
Preventive Maintenance (1 week course)
Course is designed for maintenance personnel. Students attending this training will:
- Learn daily, weekly and monthly preventive maintenance items.
- Understand the purpose and function of testing.
- Study corrective methods based upon test results
- Class will be tailored to meet your specific maintenance needs.
Software Training (1 week course)
Course is designed for experienced operators, maintenance personnel, and process engineers.
Students attending this training will:
- Demonstrate understanding of communications subsystems.
- Demonstrate ability to navigate within the software hierarchy.
- Locate, identify and describe job and reticle component files, and their function.
- Locate, identify and describe user setup parameters, machine parameters,
maintenance offset 1 and 2 parameter sets, and sequence parameters.
- Perform "create a job" - job must run without error on the stepper.
- Perform "create a reticle" - reticle must load and align without error.
- Locate, identify, describe and execute major commands from command utility window.
- Perform back up and restore operations, including CAM backup.
* Additional advanced operations software training is available upon
customer request.
Advanced Maintenance (1 week course)
Course is designed for maintenance personal with at least 1 year of experience on the
Canon Stepper. Students attending this training will perform:
- Illumination subsystem intensity degradation testing analysis and corrective maintenance
- XYZ sensor check and adjustment
- Wafer feeder check, adjust and manual control
- Reticle feeder check, adjust and manual control
Troubleshooting (2 week course)
Course is designed for maintenance personnel with at least 1 year of experience on the
Canon Stepper. Students attending this training will perform:
- Air bearing stage check, adjust and fault isolation
- Theta Z tilt unit check, adjust and fault isolation
- Alignment light source unit check, adjust and fault isolation
- Fine reticle alignment light intensity degradation testing and corrective maintenance
- Illumination subsystem intensity degradation testing analysis and corrective maintenance
- EWS failure analysis
- XYZ sensor check and adjustment
- Wafer feeder check, adjust and manual control
- Reticle feeder check, adjust and manual control
* The procedures and techniques administered within this course present the possibility of
causing damage to the system. Therefore, only qualified personnel should be assigned to this course.
|
