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Now Available: CANON MPA-500FAB

Posted on: 10/07/2015

Looking for a mirror projection aligner?

SERVTECH, Inc. has two of the Canon MPA-500FAb system available.  They are in stock and stored in our warehouse in the United States. The MPA-500FAb is a great mirror projection mask aligner that may just be the right photolithography equipment for your process.

The MPA-500FAb is a 1:1 mirror projection aligner which can accommodate wafer sizes between 3 inches and 5 inches, and mask sizes between 4 inches and 6 inches. The auto feeder allows for single, cassette-to-cassette, backside wafer handling.

Number of stocks available: 2

Product Specifications:

Auto Feeder: Single, cassette to cassette, backside wafer handling
Wafer Size: 5”, 4” and 3”
Mask size: 6”, 5” and 4”
Illumination: 2KW High Pressure Mercury Lamp
Intensity: > 600mW / cm2 (6 inch wafer)
Illumination Uniformity: + 3%
Aperture sizes: 1.0, 1.1,
Exposure Uniformity: + 3%
Resolution: 1.5μm (positive resist)
Depth of Focus: >  + 6μm (line width 1.5μm)
Magnification: < 0.4μm (3sigma)
Distortion: 3sigma < 0.5um
Scanning Accuracy: < + 1.5%
Auto Alignment Accuracy: LBS AA 3sigma < 0.6um (HeNe laser beam scan)
Throughput (6”wafer): > 83 wfs/h (first mask mode)
> 72 wfs/h (LBS AA mode


SERVTECH’s quality service does not end with just providing you with our products. We also ensure that your engineers will be well-trained for the operation of our photolithography equipment. Our experts will ensure that all your questions about the MPA-500FAb will be answered, and that you will be able to use it to its fullest potential. The MPA-500FAb is a good investment and we’ll let you know how to maximize this wonderful equipment. Contact us today if you are interested in learning more about our training program.

Trust only in SERVTECH for your Photolithography needs

SERVTECH, Inc. is known for providing expert photolithography solutions to its customers for over 20 years. For the best Canon Steppers and Mirror Projection Aligners, there’s no better name to trust – SERVTECH is truly number one!

Do you have more questions about the Canon MPA-500FAb? Give us a call and we will let you know why it is the right photolithography equipment for you!