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AVAILABLE EQUIPMENT: Canon FPA and MPA

Posted on: 06/01/2016

SERVTECH, Inc., home of quality photolithography equipment, which includes the Canon FPA-3000 Series Steppers and Canon Mirror Projection Aligners.  Today, we would like to highlight the photolithography equipment that we currently have in stock. Right now, SERVTECH has the Canon MPA-600FA, the Canon MPA-600Super, and the Canon MPA-500FAb in our inventory. One of these systems may just be the right photolithography equipment for you. Read on to find out why.

Canon MPA-600FA

The Canon MPA-600FA was first released in 1985. It was developed to provide support for 6-inch wafers in comparison to the MPA-500FAb, which was released in 1979 and can only support up to 5 inch wafers.  The need for mirror projection aligners (MPAs) came about with the need to achieve high-resolution circuits on wafers.

The Canon MPA-600FA is a 1X mirror projection aligner.  The auto feeder on this system can support single or double, cassette to cassette backside wafer handling. In addition, the Canon MPA 600-FA can handle wafers from 4 to 6 inches and mask size of 5 to 7 inches.

For technical specifications of the Canon MPA-600FA, please go to the equipment specification page which you can find by clicking the following link:

http://www.servtechinc.com/equipment-specifications/Canon-MPA-600FA

Canon MPA-600Super

The Canon MPA-600Super is a 1:1 mirror projection mask aligner with the capabilities to handle 4-inch to 6-inch wafer size and 5-inch to 7-inch mask size. Like the auto-feeder on the MPA-600FA, the Canon MPA-600Super can handle single or double, cassette to cassette, backside wafer handling.  In addition, the MPA-600Super provides improved overlay accuracy and a higher level of throughput and stability.

Canon MPA-600 Super is the successor of The MPA-600 FA, and was released in 1995. TV Auto alignment, automated PDC, and linear motor-driven LAB were added to the MPA-600Super. It is also the last model of the Canon Mirror Projection aligners.

For technical specifications of the Canon MPA-600Super, please go to the equipment specification page.

Canon MPA-500FAb

The Canon MPA-500FAb was the first of the Mirror Projection Aligner’s to be produced by Canon.  This system is a 1:1 mirror projection aligner.  The auto feeder can handle single, cassette to cassette, backside wafer handling and the system can support wafer sizes ranging from 3” to 5” and mask sizes 4” to 6”.  Although this is one of the one of the older systems, it’s a solid work horse that’s available at a very reasonable price.

For technical specifications of the Canon MPA-500FAb, please go to the equipment specification page.

Terms on Available Equipment 

All three systems are currently in stock and available for immediate purchase. SERVTECH offers all Canon systems in either “as-is” or refurbished condition. In addition, all refurbished systems come with installation and a complete service and parts warranty.

If you need specific payment terms, please let us know.  We’re happy to work with you to set up a buying plan that will suit your needs.

Please give SERVTECH, Inc. a call to discuss our available Canon MPA-600FA, Canon MPA-600Super or Canon MPA-500FAb systems.