SERVTECH
Professional Photolithography Solutions
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AVAILABLE EQUIPMENTS

Our focus on sales, service, support and training of Canon Steppers and MPAs, provides our customers with the unique advantage of a single source for all your Canon photolithography procurement needs. We are experienced in sourcing and systems analysis to insure you are getting the right equipment to meet the demands of your specific fabrication.

If you don’t see availability in the equipment you are looking for, let our worldwide network go to work for you to find the equipment to meet your requirements. Contact us with your inquiries today.

Canon FPA-3000iW  (3 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat
Parts Tool
Data and photos are available

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Canon FPA-3000EX4  (1 available)
System is stored in temperature controlled warehouse.

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Canon MPA-600Super  (1 available)
System is in excellent condition and it is one of the last MPA-600Supers that Canon manufactured. System is powered off and stored in warehouses. System is available for immediate inspection. Tool has been inspected by a SERVTECH engineer.
As Is or Refurbished
Installation can be included
Warranty included in purchase of refurbished system

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Canon MPA-600FA  (1 available)
System can be purchased as is or refurbished. Installation and warranty are included with the refurbished option. Wafer size 4" - 6".

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Canon MPA-500FAb  (5 available)
(5) Canon MPA-500
Complete systems
Non-refurbished

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Canon FPA-2500i1  (2 available)

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Canon FPA-2500i3  (2 available)

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All equipment is subject to prior sale.