SERVTECH
Professional Photolithography Solutions
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AVAILABLE EQUIPMENT

Our focus on sales, service, support and training of Canon Steppers and MPAs, provides our customers with the unique advantage of a single source for all your Canon photolithography procurement needs. We are experienced in sourcing and systems analysis to insure you are getting the right equipment to meet the demands of your specific fabrication.

If you don’t see availability in the equipment you are looking for, let our worldwide network go to work for you to find the equipment to meet your requirements. Contact us with your inquiries today.

Canon FPA-3000iW  (1 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat
SERVTECH owns the system
The iW is crated & stored in a temperature controlled facility

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Canon FPA-3000i4  (2 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat
1st System is Vintage 1995
2nd System is Vintage 1997

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Canon FPA-3000i5  (2 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat
Audit performed by SERVTECH engineer & distortion data is available
Both systems are Vintage 1997

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Canon FPA-3000i5+  (5 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat

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Canon FPA-3000EX5  (5 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat
Systems are vintage 1998 & 1999

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Canon FPA-3000EX6  (1 available)
Canon 6" Reticle Changer
Wafer 4" - 8" Notch or Flat
System is Vintage 2000

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Canon FPA-5000 ES4  (2 available)

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Canon MPA-600Super  (1 available)
As Is or Refurbished
Installation can be included
Warranty included in purchase of refurbished system

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Canon MPA-600FA  (1 available)
Refurbished
Includes Installation
1 Year Limited Warranty
CTC Unit
Available for Immediate Inspection

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Canon MPA-500FAb  (4 available)
As Is or Refurbished
Installation can be included
Warranty included in purchase of refurbished system.

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All equipment is subject to prior sale.


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